CMOS monolithic active pixel sensors for charged particle tracking applications

C. Andreoli, M. Manghisoni, E. Pozzati, L. Ratti, V. Re, V. Speziali, G. Traversi

Monolithic active pixel sensors (MAPS) in CMOS technology are considered very promising as a replacement or a valid competitor with CCD detectors in many applications. The main reason for the ever growing interest in CMOS MAPS lies in the opportunity of integrating analog and digital processing electronics together with the sensor array in the same substrate, taking advantage of the large scale of integration and low power dissipation available through commercial, low-cost CMOS processes. In the last few years, many efforts were made to extend the application field of CMOS MAPS to high-granularity particle detection in high energy physics experiments. The interest of the particle physics community for monolithic active pixel sensors stems from them being a possible solution to the material budget issue put forward by the experiments to be run at the future colliders.

This research activity is concerned with the feasibility study of a new implementation of CMOS monolithic active pixel sensors (MAPS) for applications to charged particle tracking. As compared to standard three MOSFET MAPS, where the charge signal is read out by a source follower, the proposed front-end scheme relies upon a charge sensitive amplifier (CSA), embedded in the elementary pixel cell, to perform charge-to-voltage conversion. The area required for the integration of the front-end electronics is mostly provided by the collecting electrode, which consists of a deep n-type diffusion (deep n-well, DNW), available as a shielding frame for n-channel devices in deep submicron, triple well CMOS technologies. Based on the above concept, a chip (called Apsel, active pixel sensor electronics), which includes several test structures differing in the sensitive element area, has been fabricated in a 0.13 um CMOS process. Tests with laser and radioactive sources have demonstrated that the sensor is capable of detecting ionizing radiation. The same design criteria have been used in the development of a prototype monolithic CMOS sensor for the vertex detector of one of the International Linear Collider (ILC) experiments. In this prototype, the readout architecture takes advantage of a sparsification technique to reduce the amount of data to be sent off the chip, therefore complying with the time constraints set for the ILC environment.

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