Lecturer: Sabina Merlo  

Course name: Microsensors, Integrated Microsystems and MEMS 
Course code: 064150
Degree course: Ingegneria Elettronica
Disciplinary field of science: ING-INF/01
L'insegnamento è caratterizzante per: Ingegneria Elettronica
University credits: CFU 5
Course website: http://ims.unipv.it/MEMS/

Specific course objectives

The course represents a general introduction to microelectromechanical systems.

Course programme

The principle of operation of linear accelerometers, resonators, gyroscopes, pressure sensors are described. A detailed analysis of electrostatic actuators is carried on. The basic elements of MEMS fabrication are described. MOEMS are then reviewed, in particular with regard to micromirrors for laser scanning and optical switches. Electrical and optical methods for device chracterization are illustrated. Electronic interfaces for MEMS devices are discussed. Biomedical applications such as Lab-on-chip are also covered. Specific seminars are proposed each year.

Course entry requirements

Electronic circuits. Electromagnetic waves.

Course structure and teaching

Lectures (hours/year in lecture theatre): 36
Practical class (hours/year in lecture theatre): 3
Practicals / Workshops (hours/year in lecture theatre): 0

Suggested reading materials

P. Ray-Choudhory. MEMS e MOEMS, Technology and Applications. SPIE Press.

Testing and exams

Each student has to attend more than 70% of the lectures. If the final examination is held immediately at the end of the course, it may consist of a revision and presentation of the content of a paper related to MEMS/MOEMS/Microsystems, recently published on international scientific journals. Otherwise, the final oral examination will cover all the material discussed in the course.