Lecturer: Valerio Annovazzi Lodi   Fabio Carli   Piero Malcovati   Sabina Merlo  

Course name: Microsensors, Integrated Microsystems And MEMS
Course code: 502993
Degree course: Bioingegneria, Ingegneria Elettrica, Ingegneria Elettronica, Computer Engeneering
Disciplinary field of science: ING-INF/01
University credits: ECTS 6
Course website: http://ims.unipv.it/MEMS/

Specific course objectives

This course represents a general introduction to microelectromechanical systems.

Course programme

The principle of operation of linear accelerometers, resonators, gyroscopes, pressure sensors are described. A detailed analysis of electrostatic actuators is carried on. The basic elements of MEMS fabrication are described. MOEMS are then reviewed, in particular with regard to micromirrors for laser scanning and optical switches. Electrical and optical methods for device chracterization are illustrated. Electronic interfaces for MEMS devices are discussed. Biomedical applications such as Lab-on-chip are also covered. Specific seminars are proposed each year.

Course entry requirements

Principles of mechanics. Electronic circuits. Electromagnetic waves.

Course structure and teaching

Lectures (hours/year in lecture theatre): 46
Practical class (hours/year in lecture theatre): 0
Practicals / Workshops (hours/year in lecture theatre): 0

Suggested reading materials

Copies of transparencies and supplementary material available on the course web-site

Testing and exams

the final exam consists in a close-book written test.